Chris,

If you are talking about removing Organo Silane, UV-Ozone cleaning process
can oxidize the organic phase and leave the Silicon or SiO2. It also depends
on the thickness of the organo silane layer. You can visit
http://www.samcointl.com/prod/UVO.html for more information on SAMCO's
UV-Ozone Cleaning systems.

Shahram



Christopher Khoury wrote:

> Does anyone have ideas on a cleaning process that will remove silane
> chemistries from SIlicon without affecting Si or SiO2? Maybe a mechanical
> clean?
>
> -chris
>
> --
> Christopher Khoury          Nanosphere, Inc.
> Microsystems Engineer       1818 Skokie Blvd. Suite 200
> [email protected]  Northbrook, IL 60062
> W:(847)656-0240             F:(847)562-8886
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