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MEMSnet Home: MEMS-Talk: Ti/W etch
Ti/W etch
2002-06-21
Peter & Judy Wright
2002-06-21
Brad Cantos
2002-06-21
Inna
Ti/W etch
Inna
2002-06-21
There is a company called Transene. Tel: 978-777-7860, web: www.transene.com
They have a wide variety of etchants for a lot of metals and alloys.

Good luck,


Inna Mushkatinskaya

Sr. Process Specialist
Anvik Corporation
6 Skyline Drive
Hawthorne NY 10532

Tel: 914-345-2442, etx.18
Fax: 914-345-2452

Web: www.anvik.com
E-mail: [email protected]



on 6/21/02 2:56 AM, Peter & Judy Wright at [email protected] wrote:

> Does anyone know of an etchant that can be used to remove a Ti/W underbump
> metalization and that will not attack Sn or Pb?
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