Reply to:   RE>micromachined microphone arrays

From:  Jonathan Bernstein
To:  Gamze Erten
       Draper labs has been building micromachined microphones for several
years.  We published a paper on this work at the 1996 Solid State Sensor and
Actuator Workshop, Hilton Head SC, June 1996.  To date we have achieved
sensitivity of 30 to 40 mV/Pa, in a bandwidth of 30 kHz, using on-chip JFET
buffer amplifiers.
         Most of the work in this area is going on in Europe (the Danish
Mikroelektronik Centret working with B&K, the Dutch, and the Germans), but
there is some work at Knowles in Itasca Illinois (the hearing aid company)
which has announced a product, as well as University work in Canada.  A good
review paper was written recently by Sessler.
      For further information, I can be reached at:
jbernstein.draper.com
Jonathan Bernstein
Draper Labs, MS 37
555 Technology Square
Cambridge, MA 02139


--------------------------------------
Date: 10/16/96 3:59 AM
To: Jonathan Bernstein
From: Gamze Erten

Dear MEMS Readers,

We are looking for product samples and/or design layout of silicon
micromachined microphones.  I have not been able to locate these
so far.  I am hoping that you can help.

Thank you in advance.

- - Gamze