A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: PDMS etching
PDMS etching
2002-07-10
Keyur Shah
2002-07-10
Heiko van der Linden
2002-07-10
Yen-Wen Lu
PDMS etching
Keyur Shah
2002-07-10
Hello everybody,

I want to etch PDMS for my research work. Can anybody
suggest me the ways to etch it? Is it possible to etch
PDMS by using oxygen plasma? if yes, what is the etch
rate?

Thanking you all in anticipation,

Keyur Shah

=====
Keyur Shah
M.S(Chemical Engineering), Louisiana Tech University
Research Assistant, Louisiana Tech University
Apt#12, 106, South Homer Street,
Ruston, Louisiana-71270,USA.
phone no:318-513-9240
Sign up for SBC Yahoo! Dial - First Month Free
http://sbc.yahoo.com

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing
Mentor Graphics Corporation