I met such a problem previousely, but it has been removed when the e-beam
current is promoted slowly enough. You may need to monitor the evaporation
frequently in the crucible during the whole current-promoting process.

Good Luck,
Hongjun Zeng


Message: 2
From: "Zhihai Zhang" 
To: 
Date: Thu, 11 Jul 2002 14:27:23 -0600
Subject: [mems-talk] Al evaporation
Reply-To: [email protected]

Hello everyone,
I need do Al e-beam evaporation frequently.
However after several times, Al always spill out of the crucible and get the
crucible cracked. I use small ramp rate, it still happened.
How can I prevent it?
Thnaks,

Zhihai