Zhihai,
Al alloys with the carbon and destroys it.  You need to use a BN crucible.
You can get them from RD Mathis Co.  If you get the insulating kind you can
take a piece of tungsten wire and loop it over the edge of the crucible so
that it touches the hearth.  Then the Al will be electrically connected to
the hearth.
Milan

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Zhihai Zhang
Sent: Thursday, July 11, 2002 3:27 PM
To: [email protected]
Subject: [mems-talk] Al evaporation


Hello everyone,
I need do Al e-beam evaporation frequently.
However after several times, Al always spill out of the crucible and get the
crucible cracked. I use small ramp rate, it still happened.
How can I prevent it?
Thnaks,

Zhihai
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/