We (U of Louisville, E.E. dept.) just had a SUSS CL200 installed with
megasonic cleaning. So far, so good...

-Mike

>>> [email protected] 07/14/02 07:48PM >>>
Hello,

We are looking into megasonics wafer cleaning for the removal of
particles down to the submicron level. Can anyone recommend vendors?

Thanks,

Luke Ghislain
Yahoo! Autos - Get free new car price quotes
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