Canyon Materials in San Diego (www.canyonmaterials.com) offers e-beam
and laser sensitive glass which may be of interest to you. They also
have access to corresponding exposure tools.
C Goetz
From: "Peng Jin"
To:
Date: Tue, 16 Jul 2002 12:59:02 +0100
Subject: [mems-talk] About the Photosensitive glass
Reply-To: [email protected]
Dear fellow MEMS Researchers,
In my experiment, I plan to use the photosensitive glass for high aspect
ratio structure. I remember that there were some informtion about it.
But I can not find it now.
Could you provide some information about the supplier of this kind of
thing. If there are somebody has done this before, could you tell which
kind equipment is necessary for it?
Any suggestion are highly appreciated.
Cheers
Peng