Hi, Peng,

Here's a paper about the photosensitive glass. This is a good MOE material.
I think it's helpful for your work.

Walter Daschner, Pin Long, Robert Stein, et.al, Cost-effective mass
fabrication of multilevel diffractive optical elements by use of a single
optical exposure with a gray-scale mask on high-energy beam-sensitive glass,
Appl.Opt., 1997, Vol.36, No.20:4675-4680

Good luck,
Hongjun

Dr. Hongjun Zeng
Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
ERF Building, 842 W. Taylor Street
Chicago, IL 60607-7022
Room 3014 ERF
Tel.: 312-413-5889, Fax: 312-996-6465

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Message: 3
From: "Peng Jin" 
To: 
Date: Tue, 16 Jul 2002 12:59:02 +0100
Subject: [mems-talk] About the Photosensitive glass
Reply-To: [email protected]

Dear fellow MEMS Researchers,

In my experiment, I plan to use the photosensitive glass for high aspect
ratio
structure. I remember that there were some informtion about it. But I can
not
find it now.

Could you provide some information about the supplier of this kind of thing.
If there are somebody has done this before, could you tell which kind
equipment is necessary for it?

Any suggestion are highly appreciated.

Cheers

Peng
>=========================================
>Dr. P. Jin
>Research Associate
>School of Manufacturing and Mechanical Engineering
>The University of Birmingham
>Edgbaston, Birmingham B15 2TT
>Tel:  ++44-121-414-4256
>=========================================