Hi Peng,

In our group of mine has used foturan glass wafers that he ordered from
mikroglas. The results were very good.
You need a very high power UV lamp (1kW or so) and a high quality quartz
mask I believe. If you don't have such a lamp mikroglas has an exposure
service available.

Greetings,
Heiko

*******************************
MESA+ Research Institute
      Twente University
         P.O. Box 217
     7500 AE Enschede
       The Netherlands
*******************************


-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of A.J Pang
Sent: Wednesday, July 17, 2002 11:43 PM
To: [email protected]
Subject: Re: [mems-talk] photosensitive glass


you can try http://www.mikroglas.com/foturane.htm

http://www.us.schott.com/tgd/english/products/foturan.html

http://www.darpa.mil/dso/thrust/md/chap/briefings/timchap2000day2/jacobs
en_s
arcos.pdf

http://www.ee.ucla.edu/~jjudy/classes/ee250a/papers/Liu_SOG_MEMS_JMEMS.p
df

http://www.spike.cc/mikroglas.htm

http://ipewww.epfl.ch/gr_buttet/Manips/Nanotubes/papers/CNTpapers/Applic
atio
ns/Wang_APL98.pdf

I think you need a UV light source and a high temperature oven (up to
700
deg)

cheers,

AJ Pang

----- Original Message -----
From: "Christopher J. Goetz" 
To: 
Sent: Wednesday, July 17, 2002 5:11 PM
Subject: [mems-talk] photosensitive glass


> Canyon Materials in San Diego (www.canyonmaterials.com) offers e-beam
> and laser sensitive glass which may be of interest to you. They also
> have access to corresponding exposure tools.
>
> C Goetz
>
> From: "Peng Jin" 
> To: 
> Date: Tue, 16 Jul 2002 12:59:02 +0100
> Subject: [mems-talk] About the Photosensitive glass
> Reply-To: [email protected]
>
> Dear fellow MEMS Researchers,
>
> In my experiment, I plan to use the photosensitive glass for high
> aspect
>
> ratio structure. I remember that there were some informtion about it.
> But I can not find it now.
>
> Could you provide some information about the supplier of this kind of
> thing. If there are somebody has done this before, could you tell
> which kind equipment is necessary for it?
>
> Any suggestion are highly appreciated.
>
> Cheers
>
> Peng
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