A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Aluminum etch problem
Aluminum etch problem
Any MEMS Gyro to buy?
2002-07-23
Robert Dean
2002-07-23
Robert Dean
2002-07-24
Xuchun Liu
non-shrinking epoxy
2002-07-25
Yu Chang
2002-07-24
Greg Miller
2002-07-24
[email protected]
2002-07-24
Bill Moffat
Aluminum etch problem
[email protected]
2002-07-24
You could try doing an aluminum lift-off technique to accomplish the same
results with little effect on the copper. Try Bill Moffett at Yield
Engineering Service (YES) as he is an expert on such techniques. Bob Henderson

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Tanner EDA by Mentor Graphics
Addison Engineering
The Branford Group