Are you sure your diamond film is not conducting.  Depending on your process
many diamond-like-films will show some conductivity.

Good luck.

Richard T. Martin
Principal Engineer
Innovative Micro Technology
75 Robin Hill Road
Goleta, CA 93117
(805) 681-2824
[email protected] 
www.imtmems.com 



-----Original Message-----
From: Xiaoshan Zhu [mailto:[email protected]]
Sent: Friday, July 26, 2002 5:05 PM
To: [email protected]
Subject: [mems-talk] problem in diamond film


Hi, there,

Does sombody process diamond film (on Si substrate)?

I deposit Au layer(4000A) to form two electrodes on diamond film(>6um).
These two electrodes are sperated by etching. But Test always shows that
there is a resistance (~400K)between two electrodes. I am very confused
about it. I am quite sure Au doesn't touch with Si substrate and no crack in
diamond film.

Do you have some good analysis?

Thanks very much!

Xiaoshan
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