Did you check the diamond film for conductivity *after* you coated it with
metal, and then etched the metal off? Are you sure you etched the gold
long enough?
Jesse Fowler
UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
Los Angeles, CA 90095-1597 | (310)825-3977
"The only place you'll find success before work is in the dictionary."
-- May B. Smith
On Mon, 29 Jul 2002, Xiaoshan Zhu wrote:
> BTW, the diamond film is not conductive. That's why I am so confused.
>
> ----- Original Message -----
> From: "Martin, Dick"
> To:
> Sent: Monday, July 29, 2002 10:24 AM
> Subject: RE: [mems-talk] problem in diamond film
>
>
> > Are you sure your diamond film is not conducting. Depending on your
> process
> > many diamond-like-films will show some conductivity.
> >
> > Good luck.
> >
> > Richard T. Martin
> > Principal Engineer
> > Innovative Micro Technology
> > 75 Robin Hill Road
> > Goleta, CA 93117
> > (805) 681-2824
> > [email protected]
> > www.imtmems.com
> >
> >
> >
> > -----Original Message-----
> > From: Xiaoshan Zhu [mailto:[email protected]]
> > Sent: Friday, July 26, 2002 5:05 PM
> > To: [email protected]
> > Subject: [mems-talk] problem in diamond film
> >
> >
> > Hi, there,
> >
> > Does sombody process diamond film (on Si substrate)?
> >
> > I deposit Au layer(4000A) to form two electrodes on diamond film(>6um).
> > These two electrodes are sperated by etching. But Test always shows that
> > there is a resistance (~400K)between two electrodes. I am very confused
> > about it. I am quite sure Au doesn't touch with Si substrate and no crack
> in
> > diamond film.
> >
> > Do you have some good analysis?
> >
> > Thanks very much!
> >
> > Xiaoshan
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