EVG offers a tool to do this type of overlay check.  Call the Phoenix
office: 602 437 9492

-----Original Message-----
From: Roger Brennan [mailto:[email protected]]
Sent: Wednesday, July 31, 2002 9:05 AM
To: [email protected]
Subject: [mems-talk] Front-to-Back Inspection Microscope


Hi,

I am looking for a method of checking frontside-to-backside alignment at
develop inspect.  The photoresist pattern (on both sides of the silicon
wafer) is a little over a micron thick.  Years ago, AO (American Optical)
offered such a microscope. All suggestions will be appreciated.

Thanks in advance,
Roger Brennan

Endevco
355 N. Pastoria Avenue
Sunnyvale, CA 94085
(408)-739-3533 ext 204
[email protected]

1403 Forrestal Ave.
San Jose, CA 95110
(408)-453-0711
[email protected]
Roger Brennan
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