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MEMSnet Home: MEMS-Talk: MgO Etchant
MgO Etchant
2002-08-01
Jon M Hiller
2002-08-01
Jon M Hiller
MgO Etchant
Jon M Hiller
2002-08-01
Dear List,



Does anyone have a good recipe for etching MgO?  Specifically I have a
thin PZT film deposited on a 250mm MgO substrate.  I would like to
remove all of the substrate and collect the film for TEM analysis.



Best regards,



Jon Hiller



Jon M. Hiller

Argonne National Laboratory

Electron Microscopy Center

Materials Science Division

Tel:  630-252-9558

Fax:  630-252-4289

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