Dear Eric,
Thanks a lot for your reply. It is interesting to read that you can do it with
SU8.
Did you publish on this already? I would be interested to know how to design the
mask exactly.
Best regards
Magali
Eric Johnson wrote:
> Magali,
>
> We have used SU8 with a gray scale mask and were able to form analog patterns
> in it. You need to match the linear response of SU8 with the OD, or exposure
> dose, for your desired profile.
>
> Let me know if this helps
>
> Eric G. Johnson, PhD
> Assistant Professor of Optics
> School of Optics/CREOL
> University of Central Florida
> P.O. Box 162700
> 4000 Central Florida Blvd
> Orlando, FL 32816-2700
> (407)823-6803
> Fax 823-6880
>
> >>> [email protected] 8/1/2002 9:56:33 AM >>>
> Hello All,
>
> I am working with SU8 and there is something i would like to try with
> it, but i am not sure it is possible:
> I would like to create SU 8 structures with sloped walls (as oppose to
> vertical). Can we use a graded mask (from dark to light without steps)
> for this? has anyone done it before?
> If yes, are the results convincing?
>
> Thanks a lot in advance for your help,
>
> Magali Brunet
> --
> PEI Technologies,
> NMRC, Lee Maltings, University College,
> Cork, Ireland.
>
> Tel: +353 21 4 904279
> Fax: +353 21 4 270271
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PEI Technologies,
NMRC, Lee Maltings, University College,
Cork, Ireland.
Tel: +353 21 4 904279
Fax: +353 21 4 270271
email: [email protected]
