Hi,

I am trying to spin coat SPR-220-7 thick resist from MicroChem with an
objective of getting 10-40 micron thick layers. I tried the process supplied
by the company but it seems to give an uneven coat. Could anybody suggest some
recipes for coating 10-40 micron thick layers with SPR_220.
I Thank you in advance for your help.


Mahesh Pitchumani
School of Optics/CREOL,
University of Central Florida.
4000 Central Florida Blvd,
Orlando, FL 32816-2700
Ph  : 407-823-6827
Fax : 407-823-6880