Hi MEMS guys,

I got two questions:

1. Is there any small pump or filter, say like a syringe, to filter resist
right before applying it? Are there successful stories in filtering SU8,
SPR and PMMA?

2. Is there any commercially available solution to clean the residues of
the above-mentioned resists that stick to glassware? I am looking for
long-lasting solutions other than simple organic solvents like acetone.

Any feedback is highly appreciated!

Tao