Mahesh,
       Have you tried extrusion.  In our baking of thick photo resists and
polymides we keep finding references to Fast Technologies who extrude polymer
coatings.  apparently not to good for thin layers it gets better as the
thickness increases.  At 40 microns thick it gives great uniformity.  Best
contact I have is glenn Dickey 214 553 9991.  hope this helps.  Bill Moffat

-----Original Message-----
From: Mahesh Pitchumani [mailto:[email protected]]
Sent: Thursday, August 01, 2002 11:35 AM
To: [email protected]
Subject: [mems-talk] SPR-220 spin coating problem


Hi,

I am trying to spin coat SPR-220-7 thick resist from MicroChem with an
objective of getting 10-40 micron thick layers. I tried the process supplied
by the company but it seems to give an uneven coat. Could anybody suggest
some
recipes for coating 10-40 micron thick layers with SPR_220.
I Thank you in advance for your help.


Mahesh Pitchumani
School of Optics/CREOL,
University of Central Florida.
4000 Central Florida Blvd,
Orlando, FL 32816-2700
Ph  : 407-823-6827
Fax : 407-823-6880
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