Hi Peter,

   I would recommend contacting the Transene company at (transene.com or at
978-777-7860).  They have a etchants like their Tantalum Nitride SIE-8607 or
Tantalum Nitride Type III which should suit your needs.

Phil Tabada

-----Original Message-----
From: Peter & Judy Wright [mailto:[email protected]]
Sent: Tuesday, August 20, 2002 9:10 PM
To: [email protected]
Subject: [mems-talk] Tantalum nitride etch


Does anyone know of a wet etch for tantalum nitride? We are using it for an
underbump metalization at a subcontractor who does not have a dry etch
capability.

Peter Wright
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