Hi

We are working with an equipment supplier to place
alignment marks on both sides of a wafer with a laser
allowing us to use ANY photo exposure tool.
EVG,OAI,Quintel, Zuss and Nutronix are some other makers
of exposure tools with backside alignmnet.


al


From: Kousik Sivakumar [mailto:[email protected]]
Sent: Friday, August 23, 2002 4:19 PM
To: [email protected]
Subject: [mems-talk] Lithography alignment for front and back side of
wafer


Hi,
I am trying to get a through-hole in a Si wafer. I would like to know how
to perform alignment for the front and back side of a wafer. I have not
been able to align the two squares on either side of the wafer accurately.
Any suggestion regarding this will be really helpful.
Any suggestion for forming a through-hole without having to make two
squares on either side of the wafer will also be helpful.
Thanks

Kousik Sivakumar
Graduate student
Department of ECE
University of Delaware
Home: 302-737-5232
E-mail: [email protected]