A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Al2O3 etch rate
Al2O3 etch rate
2002-08-27
Chadwick Canedy
2002-08-28
Kishan Gupta
Al2O3 etch rate
Chadwick Canedy
2002-08-27
Does anybody know where I can find information regarding the etch rate of
alumina in Buffered Oxide Etch (10:1)?  thanks

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Process Variations in Microsystems Manufacturing
Addison Engineering
Nano-Master, Inc.