Pure GaAs and AlGaAs with Al content<35-40% are not attacted by HF... You
have to be concerned about HF only if you have a multilayered AlGaAs
sructure (e.g. laser) with high-Al layers..

Mike


> -----Original Message-----
> From: Peter & Judy Wright [SMTP:[email protected]]
> Sent: Wednesday, August 28, 2002 11:53 PM
> To:   [email protected]
> Subject:      RE: [mems-talk] Tantalum nitride etch
>
> Neal,
> Our wafers are GaAs so we have to avoid the use of HF.
>
> Peter Wright
>
> -----Original Message-----
> From: [email protected] [mailto:[email protected]]On
> Behalf Of Neal Ricks
> Sent: Tuesday, August 27, 2002 1:19 PM
> To: [email protected]
> Subject: Re: [mems-talk] Tantalum nitride etch
>
> Have you tried the published Tantalum etches, or do you have to avoid use
> of
> HF?
>
>
>  Peter & Judy Wright
> wrote:Does anyone know of a wet etch for tantalum nitride? We are using it
> for an
> underbump metalization at a subcontractor who does not have a dry etch
> capability.
>
> Peter Wright
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
> Yahoo! Finance - Get real-time stock quotes
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
>
>
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/