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MEMSnet Home: MEMS-Talk: Nickel-Vanadium instead of Nickel
Nickel-Vanadium instead of Nickel
2002-08-29
TEL Klaus Beschorner
Nickel-Vanadium instead of Nickel
TEL Klaus Beschorner
2002-08-29
Dear all,

in many applications, e.g. Ti-Ni-Au bond pads, pure Nickel
is replaced with a Nickel(93%)Vanadium(7%) alloy.

Even in publications from the early 80s, all I can find is
the reference that "Vanadium is added to make the nickel non-magnetic
while retaining similar properties to pure nickel as a thin film."
NiV is much easier to deposit by magnetron sputtering.

Can anybody point me to some original publications comparing
properties of the two materials as thin films ? Or mention any
other differences in the application, apart from the higher
resistivity of NiV (60 vs. 20 uOhmcm) ?

thanks
klaus
--

                        (TEEL)          Tokyo Electron Europe Limited
                                        PVD Process Support  (ex MRC)
Klaus Beschorner                                   Tel +49-7033-45683
Drosselweg 6                                       Fax +49-7033-45631
71120 Grafenau, Germany                       Mobile +49-174 315 7754




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