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MEMSnet Home: MEMS-Talk: Seed layer deposition in deep via
Seed layer deposition in deep via
2002-08-30
Han Chong
Seed layer deposition in deep via
Han Chong
2002-08-30
Hi all,
Does any one has experience in any possible method that can be used to deposit
seed layer in via with diameter of about 35 microns and a depth of 300 microns
such that electroplating can be started to metalize the deep via? Because I'm
thinking getting the seed layer into the bottom and sidewal of the deep via
could be difficult.

thanks in advance

Han



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