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MEMSnet Home: MEMS-Talk: anodic wafer bonding
anodic wafer bonding
2002-09-11
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2002-09-21
Antonius Helvoort
2002-09-23
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anodic wafer bonding
[email protected]
2002-09-11
Hello:

In anodic bonded chips, there exist electric charges in the bonding area.
If the chip is an electro-static device, will these charges interact with
electrical voltage applied?

Your help is highly appreciated.

Wenlin Jin





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