Hi all,
We are in the process of acquiring bulk etch high doped Si, using KOH or TMAH.
But as we know high doped Si will cause etch stop, how to solve the problem?
Any suggestion will be really appreciated. Thanks!
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Kewen XIE
Graduate Student
Institute of Microelectronics
Tsinghua University
Beijing 100084, P.R.China
Tel(O): +8610 6278 9147+320
Tel(H): +8610 6277 4169
Mobile: +86 13671356254
Email: [email protected]
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