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MEMSnet Home: MEMS-Talk: wafer cleaning. SC1
wafer cleaning. SC1
2002-09-16
lakshmikanth namburi
wafer cleaning. SC1
lakshmikanth namburi
2002-09-16
Hi,
What material is your substrate?
You are cleaning for organics and inorganics, but not particulates. You could
try someting like
SC1 with H20,NH3,and H2O2 for particulate removal.

Lakshmi Namburi.
Teravicta Technologies, Austin,TX.

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