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MEMSnet Home: MEMS-Talk: How to improve electroplating uniformity?
How to improve electroplating uniformity?
2002-09-17
Kin
2002-09-17
David Nemeth
2002-09-17
Robert C Cole
2002-09-18
lakshmikanth namburi
2002-09-19
Kin
How to improve electroplating uniformity?
Kin
2002-09-17
Hi all,

    I am doing gold electroplating on a 2 inch x 2 inch
ceramic with 50nm/100nm Ti/Au seed layer and a magnetic
strring is added. I set the current to 80mA and it takes
13mins to plate up to 3um. However, I found that the
uniformity was very poor. The gold thickness at the side of
the ceramic is 4-5um while the center is 3um. I would like
to ask what causes this non-uniformity and how to improve?


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