The trouble with single wafer service is that usually LPCVD is an inherently
batch process. Hence the cost to the foundry is the same for 1 wafer as it
is for 25.

>
> I'm looking for a vendor who will do LPCVD nitride deposition
> on single
> wafers or small quantities.  I only have a few 4 inch wafers to be
> coated; I'd rather not pay for a whole 25 wafer run.
>

Bill Eaton, Ph.D.
Materials & Analysis Manager
NP Photonics
5706 Corsa Avenue, Suite 100
Westlake Village, CA  91362
Voice:  (818) 991-7044 x211
eFax:   (503) 214-5559
mailto://[email protected]
www.parvenutech.com