Lionix (http://lionphotonix.nl) might be able to help you.

Gilbert

-----Original Message-----
From: Robert J. Kogut [mailto:[email protected]]
Sent: dinsdag, 17 september 2002 21:09
To: [email protected]
Subject: [mems-talk] looking for single wafer LPCVD nitride services


I'm looking for a vendor who will do LPCVD nitride deposition on single
wafers or small quantities.  I only have a few 4 inch wafers to be
coated; I'd rather not pay for a whole 25 wafer run.


 -Bob Kogut





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