Ken-Chao,
I have received a few recommendations, though I have not tried them.

1) use a solution of 5% vaseline and 95% Napthalene or Toluene
2) Use Industrial Strength Lubricant LPS2 (I think it comes in a green can)
and blow dry.  This lubricant can be filtered with a 0.2 micron Teflon filter.

Glen

At 12:00 PM 10/8/2002, you wrote:
>Message: 9
>Date: Tue, 08 Oct 2002 16:27:30 +0800
>From: Ken-Chao Chen 
>Organization: IAM NTU
>To: [email protected]
>CC: [email protected]
>Subject: [mems-talk] How to peel PDMS off from Si subtrate without tearing
>PDMS?
>Reply-To: [email protected]
>
>Hi,
>
>Learning from papers, to ease the process of peeling off PDMS, we should
>   expose the master, silicon wafer with pattern on its upper side, by
>alkyltrichlorosilane or RIE the master with trifluoromethane, before
>spining on PDMS. Is there any more convenient method to achieve the same
>effect, i.e., to reduce the adhesion between Si surface and PDMS?
>
>Thanks! Your opinion is highly appreciated!
>
>Sincerely,
>
>Ken-Chao, RA of IAM of NTU in Taiwan