Hello!
Share your ideas with other colleagues at the only conference in Europe for
scientists, engineers and researchers to push current trends in Microsystems
Metrology.

Don't miss the chance to be in on discussions taking place to shape the future
of this important field! Submit an abstract to the SPIE's conference on
Microsystems Engineering: Metrology and Inspection III (eom02)

Best regards,

C. Gorecki

Conference chair

*********

Microsystems Engineering: Metrology and Inspection III (eom02)

Part of SPIE's International Symposium on Optics and Lasers in Metrology

23-26 June 2003, ICM-International Congress Ctr., Munich, Germany

Conference Chair: Christophe Gorecki, Univ. de Franche-Comté (France)

Cochair: Anand K. Asundi, Nanyang Technological Univ. (Singapore)

Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical
systems (MOEMS) is a rapidly growing technology envisioned to gather and process
information, compute, and control an

environment or a macrosystem through actuators and sensors increasing the
affordability, functionality, and performance of smart systems. The objective of
this third conference in a series is to provide a forum to present and discuss
the recent

advances in characterization, testing and reliability of MEMS/MOEMS devices and
systems. The conference will be focused on applications of appropriate optical
measuring techniques and related techniques in the following situations:

-local analysis of material constants -strain and stress properties

-local analysis of cracks

-contact problems,

-fracture and fatigue

-aging of devices and materials

-life cycle predictability of materials

-thermal aspects and effects of radiation

- characterisation of micro-actuation mechanisms

-vibration analysis

-failure modes

-reliability and long term stability

-environmental testing

-packaging and integration or/and interface to macro-world

-predictions of life of packaged devices

-related applications.Abstract Due Date: 25 November 2002

Manuscript Due Date: 26 May 2003



**************Submission procedure 1. SUBMIT TO: EOM02, GORECKI

2. SUBMIT EACH ABSTRACT TO Microsystems Engineering: Metrology and

Inspection III (eom02)

3. ABSTRACT TITLE

4. AUTHOR LISTING (principal author first)

AFFILIATION/ADDRESS

5. PRESENTATION : oral or poster

6. BRIEF BIOGRAPHY ( principal/presenting author)

7. ABSTRACT TEXT

Approximately 250 words.

8. KEYWORDS

Submission on the web :

www.spie.org/info/eom/ www.spie.org/info/eom/ www.spie.org/info/eom/
www.spie.org/info/eom/

E-MAIL submission to: [email protected] in ASCII text

MAIL submission ::

OPTICS AND LASERS IN METROLOGY

SPIE, P.O. Box 10, Bellingham, WA 98227-0010 USA

Shipping Address: 1000 20th St., Bellingham, WA 98225 USA

FAX : one copy to SPIE at 360/647-1445 (send each abstract separately).



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Dr. Christophe Gorecki, CNRS Senior Researcher
Laboratoire d'Optique P.M. Duffieux, Faculte des Sciences et Techniques
16 route de Gray, 25030 Besancon, France
Tel: +33-3-81666607, fax: +33-3-81666423
e-mail: [email protected]