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MEMSnet Home: MEMS-Talk: Silicon Etching -Reply
Silicon Etching -Reply
1996-02-27
Rich
Silicon Etching -Reply
Rich
1996-02-27
What you are seeing is probably no different from what companies observe with
KOH/silica slurries for silicon (wafer) polishing, or for dielectric CMP-
chemical mechanical polishing.

Perhaps you might contact Rodel Corporation (Delaware, USA) or Westech/IPEC
(Phoenix, Arizona, USA).

---R.W. Griffith


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