A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Sputter deposition of tin
Sputter deposition of tin
2002-10-23
Haigh, Richard
Sputter deposition of tin
Haigh, Richard
2002-10-23
Dear Colleagues

I am looking to RF sputter a thin film of tin (100 to 300 nm) onto
either Si3N4 or Si. I wonder if anyone knows the deposition rate of this
metal and an appropriate voltage at which to deposit it?

N/B. The sputtering system has a base pressure of 1 E-6 Torr, a
sputtering pressure of 1 E-2 Torr and the gas is Ar.


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
University Wafer
MEMS Technology Review
The Branford Group