Kim and Bohzi,
              I was about to say the same thing with a simple plasma using inert
gas, Argon or Nitrogen you will roughen up the surface and increase adhesion.
Bill Moffat

-----Original Message-----
From: Dlee Li [mailto:[email protected]]
Sent: Wednesday, October 30, 2002 9:34 AM
To: [email protected]
Subject: Re:[mems-talk] Au deposition on PDMS


hi, Kim and bozhi
If you want to increase adhesion of Au layer and PDMS. I think before  you
put PDMS sample into chambe to do Au deposition, it is better to use RIE O2
to actuate PDMS surface for 10-15 seconds.This method will increase your Au
adhesion a lot.

Dlee
Research Asistant
Mechanical Department
UT At Austin
>Message: 8
>Date: Wed, 30 Oct 2002 11:48:38 +0900 (KST)
>From: Changsoon Kim 
>To: [email protected]
>Subject: [mems-talk] Au deposition on PDMS
>Reply-To: [email protected]
>
>Hello,
>
>How can the adhestion of Au to PDMS be increased?
>If you have any experience in using an adhesion
>promoter for this problem, please let me know.
>
>Thanks,
>Changsoon Kim
>
>
>

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