Dear Changsoon and Bozhi,

        Gold can be e-beam evaporated onto PDMS with a titanium or
chromium adhesion layer.  (See Bowden et al, Nature, vol. 393, p. 146)
You have to cool the PDMS during deposition to prevent the formation of
wrinkles.  Thermal evaporation might work as well.
        Depending on your application, you might also deposit PDMS onto
the metal.  This will probably require the release of the metal from a
sacrificial layer after the PDMS deposition.  To get good adhesion, a
surface treatment on the metal is typically necessary.  I've had success
with 92-023 primer from Dow Corning, in conjunction with their Sylgard
184 PDMS.  I would recommend speaking with Dow Corning Technical Support
if you are considering this option.


Darren S. Gray
Johns Hopkins University
Department of Biomedical Engineering
Baltimore, MD, USA
e-mail: [email protected]

>
> --__--__--
>
> Message: 13
> Date: Wed, 30 Oct 2002 10:54:48 -0500
> From: Bozhi Yang 
> To: [email protected]
> Subject: [mems-talk] Re:  Au deposition on PDMS
> Reply-To: [email protected]
>
> Hi, Changsoon,
>
> I meet the similar problem and I ask people yesterday about it but have not
> get a good answer.  If I get some answer I will let you know.  My problem
> is to bond Au/or Aluminum to PDMS surface.  There is few refernence on such
> stuff of Metal and PDMS.
>
> Bozhi Yang
> Scaife Hall 203, Dept. of Mechanical Engineering
> Carnegie Mellon University
> Pittsburgh, PA 15213
> Phone: 412-268-3677(office)
> email: [email protected]
>
>
>
>
> --On Wednesday, October 30, 2002 11:48 AM +0900 Changsoon Kim
>  wrote:
>
> > Hello,
> >
> > How can the adhestion of Au to PDMS be increased?
> > If you have any experience in using an adhesion
> > promoter for this problem, please let me know.
> >
> > Thanks,
> > Changsoon Kim
> >