Have you or anyone in the list tried simulating MEMS fabrication
processes or devices with TSUPREM/Synopsis and alike?

On Thu, 31 Oct 2002 [email protected] wrote:

> Does anyone out there in the exciting new world of MEMS
> have an old copy of SUPREM 3 or 4 that they might not
> need any more - I am willing to pay a reasonable price.
> I've heard that the Silvaco version is good. If you have
> another kind that's may work too.
>
> Thanks
> Ciaran
>
>
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