Try Super Glue, aka cyanoacrylate. It works well in TMAH and EDP.  It
can be dissolved it in acetone, though I've been bonding the front of
wafers to chrome coated glass and then etching the chrome to release.

Good luck,
   mike


>>> [email protected] 11/02/02 10:32AM >>>
Are there materials that can used for wafer bonding
that doesn't get etched/stripped in KOH bath? I've
already tried Apiezon black wax, crystal bond, SU-8
(not fully crossed), but they all seems to not work
quite well. I would appreciate any advice.
Thanks,
Kevin

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