Hi,

Actually, I want to ask what are the possible ways of
etching cavities on SiO2 or Si3N4 thin films. I have a
thermal sensor and I also want to etch cavites so that
I can place a materials (one at a time) in that cavity
 and determine some of its parameters.
Also, if there are other  thin films better than SiO2
and Si3N4 materials that can be used to have good
cavities, plz do tell me.
I hope you guys help me.

Imran (USA)

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