A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: SU 8 PHOTORESIST
SU 8 PHOTORESIST
2002-12-12
aslam muhammad
2002-12-13
Josef Kouba
2002-12-13
Jennifer Pagan
2002-12-13
Sang (Kevin) Kim
2002-12-14
Franck CHOLLET
SU 8 PHOTORESIST
Franck CHOLLET
2002-12-14
Dear Kevin,
according to your reply you seemed to be able to use SU8 as a mask with KOH,
as it seems that nobody could do that experiencing lift-off (and maybe very
limited etching) it would be very nice if you could share some details that
could be added to http://aveclafaux.freeservers.com/su-8.html#top for
everyone's benefit!

Thank you in advance!
FranCk



_________________________________________________________________
Add photos to your e-mail with MSN 8. Get 2 months FREE*.
http://join.msn.com/?page=features/featuredemail


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
The Branford Group
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing