A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Polysilicon piezoresistive coefficient
Metal mask for anisotropic etching in EDP, KOH
2002-12-16
Prem Pal
2002-12-16
[email protected]
Polysilicon piezoresistive coefficient
2002-12-24
M. Amien
2003-01-02
bille@npphotonics (Bill Eaton)
Polysilicon piezoresistive coefficient
M. Amien
2002-12-24
Dear all,

What are the factors influencing polysilicon piezoresistive coefficient
? Is there any relation with the poly thickness or doping concentration ?

I wonder that someone could explain that,
I'm very appreciated for any kind of explanation.

Best regard,
mamien
ITB IC processing research lab.


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
The Branford Group
MEMS Technology Review
University Wafer