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MEMSnet Home: MEMS-Talk: Anyone know a good nickel etch?
Anyone know a good nickel etch?
2003-01-09
Carl Arft
2003-01-10
David Nemeth
2003-01-10
Hanqing Li
2003-01-10
Roger Shile
2003-01-13
???
Anyone know a good nickel etch?
Carl Arft
2003-01-09
I'm trying to pattern nickel with photoresist.  Aqua regia seems to etch
too quickly, and leaves some nickel un-etched.  Anyone have any other etch
chemistries?

thanks

please respond to:  [email protected]



********************************************
Carl Arft
Dept. of Electrical and Computer Engineering
University of California, Davis
Email: [email protected]
Phone: (530) 754-9249
********************************************


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