Hi,
    My name is Paulo and I am a researcher starting MEMS activities few months
ago. It's a very potencial area but in Brazil it is in its infancy. Everything
is new for me in MEMS area. I think that someone could help me in some
information about RIE process for copper (like gaseous stream, reaction that
takes place, obtained results, ...). I really do not know if it's possible, but
if it is, please,  help me.

    Thanks in advance,

    Paulo H. de Godoy

Mechanical Engineer, Dr
Rua Rosa Pizelli D Abronzo, 187
Jrd Monumento
13405-173
Piracicaba, SP - Brazil
(T) 55 19 3421-8954