Hi, there.

In our experiments, on the surface of the sputtered Ti/Pt(on top of
SiO2), many pin holes came out after the annealing for the metals at
650C, 30min. Who can kindly tell me the reasons and the solution will be
really appereciated.

Looking forward to your help.

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Zhou, Jia
Center of Microtechnologies, Chemnitz University of Technology
Reichenhainer Street 88, RM. M211
D-09126, Chemnitz, Germany
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