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MEMSnet Home: MEMS-Talk: Chemical Durability of SiO2
Chemical Durability of SiO2
2003-02-10
Kristin J. Lynch
2003-02-11
Mighty Platypus
2003-02-12
[email protected]
Chemical Durability of SiO2
Kristin J. Lynch
2003-02-10
Is there a difference in chemical durability of SiO2 produced as
a thin film vs. SiO2 produced in the bulk?  (i.e. a silicon wafer
coated with an oxide vs a quartz plate.)

Thanks
Kristin

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