Here are two recipes for Aluminum etching:
  1) H2O: HF 1:1
  2) HCl : HNO3 : HF 1:1:1

>>> [email protected] 02/11/03 09:04 AM >>>
Hi!

We need to etch some submicron holes in an Aluminum
layer  over GaAs. The holes would be patterned on PMMA
using e-beam lithography. Is there any wet chemical
etchant that will etch away the Al leaving holes of
reasonable quality? Is reactive ion etching the only
way?

Thank you very much!

Bye & Good Luck!

Pablo B.


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