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MEMSnet Home: MEMS-Talk: Teflon AF spin on coating
Teflon AF spin on coating
2003-03-10
Xi, Jingqun
Teflon AF spin on coating
Xi, Jingqun
2003-03-10
BlankHi,
Does anyone know how to spin-on coat the Teflon AF 1600 (and 2400) on the
semiconductor wafer( GaP)? I will greatly appreciate it if some one can give me
some information about that, just like the solvent, fabrication procedure...

Thanks a lot.

Regards,

Jingqun Xi
Graduate Student
Physics, Applied Physics & Astronomy Department
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