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MEMSnet Home: MEMS-Talk: Stainless steel in TMAH
Stainless steel in TMAH
2003-03-13
Mark M
Stainless steel in TMAH
Mark M
2003-03-13
Dear All,

Does anyone have any experience of using
stainless steel nuts and bolts in TMAH
etchant?

Will the nuts and bolts be corroded together?

Will reaction bi-products contaminate the TMAH,
making it unsuitable for Si wafer etching?

Regards,
Mark.



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