Dr. Thornton,
Have you considered trying Shipley BPR100 resist?  It is formulated for such
thick resist applications, but is negative acting, so your mask would need the
opposite field polarity from the positive resists you are using.
Neal Ricks
 martin thornton  wrote:Hi everyone,
Im starting to use AZ 9260 resist and would like to build the resist
thickness up to 100 to 150 microns the predicted light transmition limit
for use as a electrodeposition mould.
Since I do not have a co rotating cover I will have build up the
thickness with multiple spins.
As a starting point Im using the process recommendation for AZ 4562 100
micron given by the supplier.

Does anyone have a nailed down receipe for AZ 9620 for a 100 micron
resist ?

thanks in advance,

Dr. Martin Thornton


CEA saclay
Ormes des Merisiers
Gif sur Yvette
91191
France

Tél: + 33 1 69 08 51 34
Fax: +33 1 69 08 87 86


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